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Apparatus And Method For Collecting Charged Particles.

Sanderson Allan, Ribton Colin Nigel

A charged particle collector assembly, particularly for use with an electron beam gun, is described. The assembly comprises a reflection member (24) onto which electrons impinge in use, the reflection member being adapted substantially to absorb particles of one polarity and substantially to reflect particles of the other polarity. A sensor or collector (23) is positioned to receive particles reflected from the reflection member 24 and to generate a corresponding output signal.

EP 87302431 A

1987

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